Comb Drive Accelerometer
I'm simulating comb drive accelerometer with ANSYS. I don't know what I should put in the section of boundary condition and loading condition. please help me. these are all of my parameters:
Beam Width Wb 2μm Beam length Lb 290μm Mass Width Wm 70μm Mass length Lm 350μm Movable finger width Wf 4μm Movable finger length Lf 160μm Fixed finger width Wff 4μm Fixed finger length Lff 200μm Total Number of Driving fingers Nd 8 Total Number of sensing fingers Ns 24 Device thickness t 4μm Capacitance gap d0 2μm Gap d1 between two driving or sensing Finger groups. 4μm Gap d2 between driving and sensing finger groups 6μm Anchor Size 20μm×20μm Outermost device area 460μm×630μm Static capacitance C0 0.068pF Sensing mass Ms 0.42μg Spring constant Ktotal 1.784N/m Resonant frequency f0 10.38kHz Displacement sensitivity Sd 3nm/g Thanks |
All times are GMT -4. The time now is 18:11. |