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[ANSYS Meshing] Comb Drive Accelerometer

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Old   July 16, 2014, 18:25
Question Comb Drive Accelerometer
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Ali Asghar Fathi
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I'm simulating comb drive accelerometer with ANSYS. I don't know what I should put in the section of boundary condition and loading condition. please help me. these are all of my parameters:

Beam Width Wb 2μm
Beam length Lb 290μm
Mass Width Wm 70μm
Mass length Lm 350μm
Movable finger width Wf 4μm
Movable finger length Lf 160μm
Fixed finger width Wff 4μm
Fixed finger length Lff 200μm
Total Number of Driving fingers Nd 8
Total Number of sensing fingers Ns 24
Device thickness t 4μm
Capacitance gap d0 2μm
Gap d1 between two driving or sensing
Finger groups.
4μm
Gap d2 between driving and sensing
finger groups
6μm
Anchor Size 20μm20μm
Outermost device area 460μm630μm
Static capacitance C0 0.068pF
Sensing mass Ms 0.42μg
Spring constant Ktotal 1.784N/m
Resonant frequency f0 10.38kHz
Displacement sensitivity Sd 3nm/g


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