Need help with simulation of Chemical Mechanical Planarization in Fluent
For my dissertation I'm trying to simulate Chemical Mechanical Planarization process in Ansys Fluent to study the flow of slurry through the grinding setup and its pressure distribution and other parameters. What is the best way to go about this?
I have the following info:
http://i46.tinypic.com/359lsv6.jpg |
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