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-   -   Need help with simulation of Chemical Mechanical Planarization in Fluent (http://www.cfd-online.com/Forums/fluent/112155-need-help-simulation-chemical-mechanical-planarization-fluent.html)

nnavinraj January 23, 2013 01:29

Need help with simulation of Chemical Mechanical Planarization in Fluent
 
For my dissertation I'm trying to simulate Chemical Mechanical Planarization process in Ansys Fluent to study the flow of slurry through the grinding setup and its pressure distribution and other parameters. What is the best way to go about this?

I have the following info:
  1. The slurry is composed of water and colloidal silica.
  2. I have made the model of the setup through which the slurry flows and attached it to this post.
  3. The gap through which the slurry flows is about 40 microns.
  4. From my searches I have determined that the Eulerian Model must be used for multiphase slurry flow.
  5. I need help/info on how the remaining options/parameters are to be chosen!!
Any help is appreciated.

http://i46.tinypic.com/359lsv6.jpg


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