CFD Online Logo CFD Online URL
www.cfd-online.com
[Sponsors]
Home > Forums > Software User Forums > ANSYS > FLUENT

Need help with simulation of Chemical Mechanical Planarization in Fluent

Register Blogs Members List Search Today's Posts Mark Forums Read

Reply
 
LinkBack Thread Tools Search this Thread Display Modes
Old   January 23, 2013, 01:29
Post Need help with simulation of Chemical Mechanical Planarization in Fluent
  #1
New Member
 
Navin Raj Natarajan
Join Date: Dec 2012
Posts: 1
Rep Power: 0
nnavinraj is on a distinguished road
For my dissertation I'm trying to simulate Chemical Mechanical Planarization process in Ansys Fluent to study the flow of slurry through the grinding setup and its pressure distribution and other parameters. What is the best way to go about this?

I have the following info:
  1. The slurry is composed of water and colloidal silica.
  2. I have made the model of the setup through which the slurry flows and attached it to this post.
  3. The gap through which the slurry flows is about 40 microns.
  4. From my searches I have determined that the Eulerian Model must be used for multiphase slurry flow.
  5. I need help/info on how the remaining options/parameters are to be chosen!!
Any help is appreciated.

nnavinraj is offline   Reply With Quote

Reply

Tags
cmp, euler, fluent, multiphase, slurry

Thread Tools Search this Thread
Search this Thread:

Advanced Search
Display Modes

Posting Rules
You may not post new threads
You may not post replies
You may not post attachments
You may not edit your posts

BB code is On
Smilies are On
[IMG] code is On
HTML code is Off
Trackbacks are Off
Pingbacks are On
Refbacks are On


Similar Threads
Thread Thread Starter Forum Replies Last Post
IC engine simulation tutorial by FLUENT yash FLUENT 4 April 6, 2015 20:44
Combustion SImulation in Fluent santhosh1987 FLUENT 0 May 14, 2010 11:32
Why is my fluent simulation giving Cp values above 1??? wils Main CFD Forum 3 March 26, 2010 10:12
IC engine simulation tutorial by FLUENT yash Main CFD Forum 1 April 21, 2009 06:05
Fluent Remote Simulation Facility Service (RSF) di Rami FLUENT 2 June 4, 2008 06:38


All times are GMT -4. The time now is 06:02.