|May 23, 2013, 07:20||
Can anyone help regarding which model used ...!!!???
Join Date: Jan 2013
Location: Rajkot, India
Posts: 36Rep Power: 5
I want to model reaction occurring inside the Electron Beam Physical Vapor Deposition Chamber (EB-PVD chamber). so which model I should use currently I am using Species transport model.
The model explanation :
a vertical chamber having crucible with oxide( say A2O3 where A is metal ) in solid form. I am apply heat using electron beam to evaporate the oxide material. the chamber is connected with vacuum ( I know that the vacuum simulation is not possible due to limitation of Knudsen no. but in my case i am maintaining such vacuum that my knudsen no. condition is satisfied i.e. kn no.=0.005).
the oxide is evaporated,chemical reaction happening inside the chamber as mentioned below
A2O3 -----> 2(AO) + O
AO --------> A +O
than a substrate is fixed above crucible at certain height on which we are depositing A2O3. The system is connected with the vacuum pump so some amount of O will leave chamber, to compensate this additional oxygen is provided so the reaction is
1st reaction is sublimation, and also can be consider as melting and than evaporation...
Now my problem is which model should be used....!!!??? I am currently using species transport.
Is It sufficient..???
please replay as early as possible...
thanks in advance...
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