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Can anyone help regarding which model used ...!!!??? |
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May 23, 2013, 07:20 |
Can anyone help regarding which model used ...!!!???
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Member
Sumeet Kotak
Join Date: Jan 2013
Location: Rajkot, India
Posts: 36
Rep Power: 13 |
Hello Friends,
I want to model reaction occurring inside the Electron Beam Physical Vapor Deposition Chamber (EB-PVD chamber). so which model I should use currently I am using Species transport model. The model explanation : a vertical chamber having crucible with oxide( say A2O3 where A is metal ) in solid form. I am apply heat using electron beam to evaporate the oxide material. the chamber is connected with vacuum ( I know that the vacuum simulation is not possible due to limitation of Knudsen no. but in my case i am maintaining such vacuum that my knudsen no. condition is satisfied i.e. kn no.=0.005). the oxide is evaporated,chemical reaction happening inside the chamber as mentioned below A2O3 -----> 2(AO) + O AO --------> A +O than a substrate is fixed above crucible at certain height on which we are depositing A2O3. The system is connected with the vacuum pump so some amount of O will leave chamber, to compensate this additional oxygen is provided so the reaction is 4(A)+3(O2)-------> 2(A2O3) 1st reaction is sublimation, and also can be consider as melting and than evaporation... Now my problem is which model should be used....!!!??? I am currently using species transport. Is It sufficient..??? please replay as early as possible... thanks in advance... |
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