CFD Online Logo CFD Online URL
www.cfd-online.com
[Sponsors]
Home > Forums > FLUENT

Modelling Gasflow of a CVD reactor in 2D

Register Blogs Members List Search Today's Posts Mark Forums Read

Reply
 
LinkBack Thread Tools Display Modes
Old   January 21, 2014, 12:23
Default Modelling Gasflow of a CVD reactor in 2D
  #1
New Member
 
Join Date: Dec 2013
Posts: 5
Rep Power: 3
NoobSaibot16 is on a distinguished road
Hi,

i want to simulate the gasflow in a HF-CVD reactor with Fluent in 2D. The gas consists of 2 species (H2 and Methane). At the top of the chamber, the gas flows in with 1l/min and at the buttom, it will be evacuated with the same amount.
The result should be, that i can see, which way the gas takes through the reactor.

As Inlet i took velocity inlet with a velocity magnitude of 0,13m/s (calculated it from inlet diameter) and as outlet pressure outlet. I could find a value, where i can define the amount of gas leaving the chamber. I checked Flux reports at outlet and inlet and i have a net of 1.2e-11.

Does fluent automaticly evacutes the same amount?

Because if i look in the results at the countour of the velocity magnitude i have region with 0 velocity in the buttom third and i think, i should have a continous velocity through the whole chamber. At the outlet, i get again a velocity >0.

I used following setup:
-General: presure based, time=steady
-Model: energy and species on, laminar flow
-solution method: coupled
- hybrid initialization
NoobSaibot16 is offline   Reply With Quote

Old   January 21, 2014, 12:33
Default
  #2
Senior Member
 
flotus1's Avatar
 
Alex
Join Date: Jun 2012
Location: Germany
Posts: 1,097
Rep Power: 19
flotus1 will become famous soon enoughflotus1 will become famous soon enough
In a successfull steady-state simulation, the mass entering the fluid domain has to be the same as the mass leaving the domain, provided that there are no sources or sinks for the mass inside the domain.

So yes, in a way fluent "automatically" evacuates the same amount.
But this rather a consequence of the continuity equation that is solved and it is not specific to the software fluent.
flotus1 is offline   Reply With Quote

Old   June 25, 2015, 08:06
Default
  #3
New Member
 
Gustavo
Join Date: Jun 2015
Posts: 24
Rep Power: 2
gustavosimiema is on a distinguished road
Hi NoobSaibot16 ,


did you find a solution for your case? Will you have a 3D Simulation too?
How did you set up the reactions?
I started working with PCVD but in low pressure Chambers.

Any hint would be much valuable

Thanks
gustavosimiema is offline   Reply With Quote

Reply

Thread Tools
Display Modes

Posting Rules
You may not post new threads
You may not post replies
You may not post attachments
You may not edit your posts

BB code is On
Smilies are On
[IMG] code is On
HTML code is Off
Trackbacks are On
Pingbacks are On
Refbacks are On


Similar Threads
Thread Thread Starter Forum Replies Last Post
error message cuteapathy CFX 14 March 20, 2012 07:45
Modelling unsteady 2D aerofoil drag xlxc34 Main CFD Forum 0 June 24, 2011 04:42
Advice on multi-phase flow modelling Martin Main CFD Forum 3 October 14, 2008 05:16
CVD / ALD Modelling Mark Main CFD Forum 0 November 25, 2005 06:17
how to ensure that your modelling is correct rvndr Main CFD Forum 7 March 1, 2004 13:21


All times are GMT -4. The time now is 20:05.