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CVD_mass fraction over wafer

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Old   May 1, 2010, 09:56
Default CVD_mass fraction over wafer
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I'm trying to model a 2D CVD reactor for atmospheric pressure silicon epitaxy of silane using the silane-hydrogen-3-step fluent's material mixture. The problem is that the SiH2 mass fraction takes 0 values over the wafer while the mole fraction doesn't. Does anyone have any idea why this happens?
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