Represent a free surface site (S) in MOCVD modeling by FLUENT

jumaah · June 12, 2016, 13:26

Hello all,
I am modeling gallium nitride deposition in CVD by ANSYS / FLUENT. Could you tell me how can represent a free surface site (S) of surface phase reaction in FLUENT
Ga(CH3)3 +S ==> Ga(s)+3CH3
Ga(CH3)2 +S ==> Ga(s)+2CH3

s=1, corresponding to a sticking probaility of unity
activation energy = 0 kcal/mol

thanks in advance for any help may provide.
Jumaah

jumaah · June 17, 2016, 12:10

What is the difference between
(selected site species and selected solid species ) in FLUENT.

June 12, 2016, 13:26	Represent a surface site (S) in MOCVD modeling by FLUENT	#1
jumaah Member Omar jumaah Join Date: Jan 2016 Posts: 36 Rep Power: 10	Hello all, I am modeling gallium nitride deposition in CVD by ANSYS / FLUENT. Could you tell me how can represent a free surface site (S) of surface phase reaction in FLUENT Ga(CH3)3 +S ==> Ga(s)+3CH3 Ga(CH3)2 +S ==> Ga(s)+2CH3 s=1, corresponding to a sticking probaility of unity activation energy = 0 kcal/mol thanks in advance for any help may provide. Jumaah Last edited by jumaah; July 4, 2016 at 15:17. Reason: change title

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June 17, 2016, 12:10		#2
jumaah Member Omar jumaah Join Date: Jan 2016 Posts: 36 Rep Power: 10	What is the difference between (selected site species and selected solid species ) in FLUENT.