CVD / ALD Modelling -- CFD Online Discussion Forums

November 25, 2005, 05:17	CVD / ALD Modelling	#1
Mark Guest Posts: n/a	Hi all, I want to simulate an Atomic Layer Deposition process using a commerical code. Does anyone have any recommendations on which code might be the best one to use for ALD modelling and does anyone here have any such experience? I need to find out what the input boundary conditions are i.e. temp, pressure, sticking Coeff, etc. I'm particularly interested in information about the sticking coefficient. Thanks cfdman

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