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Forum: FLUENT May 1, 2010, 09:56

Replies: 0 CVD_mass fraction over wafer Views: 1,404 Posted By cfduser10 CVD_mass fraction over wafer Hello, I'm trying to model a 2D CVD reactor for atmospheric pressure silicon epitaxy of silane using the silane-hydrogen-3-step fluent's material mixture. The problem is that the SiH2 mass fraction...

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