As with most of the technologies, one can know its applications only when it is invented. Today CFD is being used to help in designing in every area where Fluid is involved. CFD has found its application with semiconductor industry as well. CFD solution can help immensly in reducing the number of experiments required to design various chip manufacturing equipments. After validation with experiments, one can find finer details more easily from CFD than with experiment e.g. temperature disribution over the surface, deposition rate, rate of desorption. Various semicondutor industries have started using CFD calculation to help their design engineers. But it still has a long way to go and gain confidence from everybody to its results.