Modelling Gasflow of a CVD reactor in 2D
 

Hi,

i want to simulate the gasflow in a HF-CVD reactor with Fluent in 2D. The gas consists of 2 species (H2 and Methane). At the top of the chamber, the gas flows in with 1l/min and at the buttom, it will be evacuated with the same amount.
The result should be, that i can see, which way the gas takes through the reactor.

As Inlet i took velocity inlet with a velocity magnitude of 0,13m/s (calculated it from inlet diameter) and as outlet pressure outlet. I could find a value, where i can define the amount of gas leaving the chamber. I checked Flux reports at outlet and inlet and i have a net of 1.2e-11.

Does fluent automaticly evacutes the same amount?

Because if i look in the results at the countour of the velocity magnitude i have region with 0 velocity in the buttom third and i think, i should have a continous velocity through the whole chamber. At the outlet, i get again a velocity >0.

I used following setup:
-General: presure based, time=steady
-Model: energy and species on, laminar flow
-solution method: coupled
- hybrid initialization

In a successfull steady-state simulation, the mass entering the fluid domain has to be the same as the mass leaving the domain, provided that there are no sources or sinks for the mass inside the domain.

So yes, in a way fluent "automatically" evacuates the same amount.
But this rather a consequence of the continuity equation that is solved and it is not specific to the software fluent.

Hi NoobSaibot16 ,


did you find a solution for your case? Will you have a 3D Simulation too?
How did you set up the reactions?
I started working with PCVD but in low pressure Chambers.

Any hint would be much valuable

Thanks