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-   -   modelling adsorption and desorption reaction in fluent (https://www.cfd-online.com/Forums/fluent/171638-modelling-adsorption-desorption-reaction-fluent.html)

cfdkorea May 12, 2016 11:15

modelling adsorption and desorption reaction in fluent
 
I am trying to model following reaction on silicon surface.

SiH2Cl2+Si=Si(b)+SiH+SiCl
SiCl+Si=SiCl2+Si(b)
SiH=Si+h2


But I am not getting any deposition rates for silicon. I have put initial coverage for Si = 1. any help please.


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