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Represent a free surface site (S) in MOCVD modeling by FLUENT |
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June 12, 2016, 14:26
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Represent a surface site (S) in MOCVD modeling by FLUENT
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Member
Omar jumaah
Join Date: Jan 2016
Posts: 36
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Hello all,
I am modeling gallium nitride deposition in CVD by ANSYS / FLUENT. Could you tell me how can represent a free surface site (S) of surface phase reaction in FLUENT Ga(CH3)3 +S ==> Ga(s)+3CH3 Ga(CH3)2 +S ==> Ga(s)+2CH3 s=1, corresponding to a sticking probaility of unity activation energy = 0 kcal/mol thanks in advance for any help may provide. Jumaah Last edited by jumaah; July 4, 2016 at 16:17. Reason: change title |
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June 17, 2016, 13:10
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#2 |
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Member
Omar jumaah
Join Date: Jan 2016
Posts: 36
Rep Power: 11 |
What is the difference between
(selected site species and selected solid species ) in FLUENT. |
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