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Represent a free surface site (S) in MOCVD modeling by FLUENT

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Old   June 12, 2016, 13:26
Exclamation Represent a surface site (S) in MOCVD modeling by FLUENT
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Omar jumaah
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Hello all,
I am modeling gallium nitride deposition in CVD by ANSYS / FLUENT. Could you tell me how can represent a free surface site (S) of surface phase reaction in FLUENT
Ga(CH3)3 +S ==> Ga(s)+3CH3
Ga(CH3)2 +S ==> Ga(s)+2CH3

s=1, corresponding to a sticking probaility of unity
activation energy = 0 kcal/mol

thanks in advance for any help may provide.
Jumaah

Last edited by jumaah; July 4, 2016 at 15:17. Reason: change title
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Old   June 17, 2016, 12:10
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Omar jumaah
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What is the difference between
(selected site species and selected solid species ) in FLUENT.
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