chemical vapour deposition
 

Hi, I am doing Ph.D in turbulent combustion. I would like to know about chemical vapour deposition. Please give me suggestions regarding books and papers which are covering introduction to this topic and also modeling techniques. thanks in advance. by rajani

Re: chemical vapour deposition
 

Two references are:

Modelling of CVD of Tungsten Films, C.R. Kleijn & C.Werner, Birkhauser, 1993, ISBN 0-8176-2858-4

CVD: Principles & Applications, Ed. M.Hitchman & K.Jensen, Academic Press, 1993, ISBN 0-12-349670-5

In my limited experience of CVD processes, they are laminar rather than turbulent.

Re: chemical vapour deposition
 

thank you very much for your references. can you please give me some web based references for CVD.

Re: chemical vapour deposition
 

There is some information at the following web addresses:

http:http://www.cham.co.uk/phoenics/d_pol...oen/runcvd.htm

http://www.sandia.gov/1100/CVDwww/CVDSci.htm

Other addresses can be determined by use of a search engine on the internet.

Re: chemical vapour deposition
 

thank you very much.

Re: chemical vapour deposition
 

Dear Rajani Kumar,

Go to Colorado universities site. See the work done by Roop Lal Mahajan. He has published many reviewes and papers on CVD. Those are in very lucid language and informative.

Pargaonkar Vijay

Re: chemical vapour deposition
 

dear Vijay, thanks for your help. can you please give me some information related CVD on web. if you know any site which is having some notes on CVD then please tell me. by rajani

Re: chemical vapour deposition
 

Hi,

Out of shear ignorance, what do CVD and Turbulent combustion have in common? Thank you!

Re: chemical vapour deposition
 

Simon,

What's in common between CVD and combustion problems is mainly that both flows are chemically reacting and need some method to incorporate the chemical kinetics of the reactions into the flow field. CVD also needs to incorporate surface reactions into the model where combustion problems normally are not concerned with this. CVD problems are strictly laminar flows which are incompressible, where as combustion problems are mainly turbulent and compressible.

Chuck

Re: chemical vapour deposition
 

hi, upto know CVD is treated as a laminar process. But now people are started to think in terms of turbulence. some europien universities are participating in this one. by rajani

Re: chemical vapour deposition
 

A search on google.com gives about 61,600 hits for Chemical Vapor Deposition.

Cheers, Madhukar Rao

> can you please give me some web based references for CVD.