help about chemical reaction model
 

Hello, everyone!

I want to integrate some chemical reaction in cfd calculation. Does anyone knows about chemical reaction model in cfd calculation. would you please tell me about some references, and how to get it. I am very appreciate your help. Thanks in advance.

Best Regards,

Lawrence

Re: help about chemical reaction model
 

Lawrence,

There are a couple of CVD modeling books that discuss chemical reaction modeling that you might want to look at:

1) Computational Modeling in Semiconductor Processing by M. Meyyappan

2)Modeling of Chemical Vapor Deposition of Tungsten Films by Kleijn & Werner

I hope this helps.

Chuck

Re: help about chemical reaction model
 

Thanks for your reply. and how can I get it then?

Re: help about chemical reaction model
 

The ISBN for the first book is 0-89006-707-4 and for the second book is 3-7643-2858-4 or 0-8176-2858-4. If you can't find them in your library then try inter-library loan services at your university.

Good luck!

Chuck

Re: help about chemical reaction model
 

Thanks a lot! Chuck

lawrence