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lawrence February 25, 2002 02:36

help about chemical reaction model
 
Hello, everyone!

I want to integrate some chemical reaction in cfd calculation. Does anyone knows about chemical reaction model in cfd calculation. would you please tell me about some references, and how to get it. I am very appreciate your help. Thanks in advance.

Best Regards,

Lawrence

Chuck Leakeas February 25, 2002 17:13

Re: help about chemical reaction model
 
Lawrence,

There are a couple of CVD modeling books that discuss chemical reaction modeling that you might want to look at:

1) Computational Modeling in Semiconductor Processing by M. Meyyappan

2)Modeling of Chemical Vapor Deposition of Tungsten Films by Kleijn & Werner

I hope this helps.

Chuck

lawrence February 25, 2002 21:33

Re: help about chemical reaction model
 
Thanks for your reply. and how can I get it then?

Chuck Leakeas February 26, 2002 00:28

Re: help about chemical reaction model
 
The ISBN for the first book is 0-89006-707-4 and for the second book is 3-7643-2858-4 or 0-8176-2858-4. If you can't find them in your library then try inter-library loan services at your university.

Good luck!

Chuck

lawrence February 26, 2002 04:06

Re: help about chemical reaction model
 
Thanks a lot! Chuck

lawrence


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