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Search: Posts Made By: cfdkorea
Forum: FLUENT May 12, 2016, 11:15
Replies: 0
Views: 1,101
Posted By cfdkorea
modelling adsorption and desorption reaction in fluent

I am trying to model following reaction on silicon surface.

SiH2Cl2+Si=Si(b)+SiH+SiCl
SiCl+Si=SiCl2+Si(b)
SiH=Si+h2


But I am not getting any deposition rates for silicon. I have put...
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