CFD software for CVD simulation -- CFD Online Discussion Forums

January 4, 2000, 06:03	CFD software for CVD simulation	#1
Chao Chang Guest Posts: n/a	I am a doctor student. I am doing some studies about Heat and Mass Transfer in the chamber of Hot Filament Chemical Vapor Deposition diamond thin films now. I do not know which CFD software can solve not only the heat transfer and the gas flow but also the chemical reactions occupied among gases and substrate surface. Any advice is welcomed. And if you can tell me how to obtain the demo versions for the evalution of future purchase, I would be very appreciated.

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