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modelling adsorption and desorption reaction in fluent

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Old   May 12, 2016, 11:15
Default modelling adsorption and desorption reaction in fluent
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I am trying to model following reaction on silicon surface.

SiH2Cl2+Si=Si(b)+SiH+SiCl
SiCl+Si=SiCl2+Si(b)
SiH=Si+h2


But I am not getting any deposition rates for silicon. I have put initial coverage for Si = 1. any help please.
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